Electrostatic BEM for MEMS with thin beams (Q3022745)

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scientific article; zbMATH DE number 2183967
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    Electrostatic BEM for MEMS with thin beams
    scientific article; zbMATH DE number 2183967

      Statements

      Electrostatic BEM for MEMS with thin beams (English)
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      30 June 2005
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      boundary integral equations
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      boundary element method
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      singular integrals
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      nearly singular integrals
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      micro-electro-mechanical systems
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      thin beams
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      thin curved beams
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