Electrostatic BEM for MEMS with thin beams (Q3022745)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Electrostatic BEM for MEMS with thin beams |
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Electrostatic BEM for MEMS with thin beams (English)
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30 June 2005
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boundary integral equations
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boundary element method
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singular integrals
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nearly singular integrals
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micro-electro-mechanical systems
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thin beams
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thin curved beams
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