BEM modeling of damping forces on MEMS with thin plates (Q2269309)
From MaRDI portal
scientific article
Language | Label | Description | Also known as |
---|---|---|---|
English | BEM modeling of damping forces on MEMS with thin plates |
scientific article |
Statements
BEM modeling of damping forces on MEMS with thin plates (English)
0 references
16 March 2010
0 references
micro-electro-mechanical systems (MEMS)
0 references
boundary element method (BEM)
0 references
thin plates
0 references
Stokes flow
0 references
damping forces
0 references
0 references
0 references
0 references