BEM modeling of damping forces on MEMS with thin plates (Q2269309)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | BEM modeling of damping forces on MEMS with thin plates |
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BEM modeling of damping forces on MEMS with thin plates (English)
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16 March 2010
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micro-electro-mechanical systems (MEMS)
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boundary element method (BEM)
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thin plates
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Stokes flow
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damping forces
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