BEM modeling of damping forces on MEMS with thin plates (Q2269309)

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BEM modeling of damping forces on MEMS with thin plates
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    BEM modeling of damping forces on MEMS with thin plates (English)
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    16 March 2010
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    micro-electro-mechanical systems (MEMS)
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    boundary element method (BEM)
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    thin plates
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    Stokes flow
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    damping forces
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