Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework (Q3055360)
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scientific article; zbMATH DE number 5813270
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| English | Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework |
scientific article; zbMATH DE number 5813270 |
Statements
Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework (English)
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7 November 2010
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performance assessment
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run-to-run control
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minimum variance performance
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best achievable performance
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IMC
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0.8156995
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0.7945199
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0.7921195
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0.7851632
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