Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework (Q3055360)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework |
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Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework (English)
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7 November 2010
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performance assessment
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run-to-run control
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minimum variance performance
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best achievable performance
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IMC
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