Study the effect of CO\(_2\) laser annealing on silicon nanostructures (Q3070516)
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scientific article; zbMATH DE number 5844442
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| English | Study the effect of CO\(_2\) laser annealing on silicon nanostructures |
scientific article; zbMATH DE number 5844442 |
Statements
Study the Effect of CO2 Laser Annealing on Silicon Nanostructures (English)
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3 February 2011
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silicon nanostructures
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laser ablation
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laser annealing
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0.7352378964424133
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0.6324638724327087
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0.631826639175415
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0.6300804615020752
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0.6246090531349182
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