Features of the formation of silicon nanocrystals upon the annealing of SiO\(_2\) layers implanted with Si ions (Q693973)
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scientific article; zbMATH DE number 6114885
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| English | Features of the formation of silicon nanocrystals upon the annealing of SiO\(_2\) layers implanted with Si ions |
scientific article; zbMATH DE number 6114885 |
Statements
Features of the formation of silicon nanocrystals upon the annealing of SiO\(_2\) layers implanted with Si ions (English)
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11 December 2012
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0.7352378964424133
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0.6705834269523621
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0.6575227975845337
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0.6472631692886353
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0.6370021104812622
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