Features of the formation of silicon nanocrystals upon the annealing of SiO\(_2\) layers implanted with Si ions (Q693973)

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Features of the formation of silicon nanocrystals upon the annealing of SiO\(_2\) layers implanted with Si ions
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    Features of the formation of silicon nanocrystals upon the annealing of SiO\(_2\) layers implanted with Si ions (English)
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    11 December 2012
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