Viscous fluid damping in a laterally oscillating finger of a comb-drive micro-resonator based on micro-polar fluid theory (Q332874)
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scientific article; zbMATH DE number 6649715
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| English | Viscous fluid damping in a laterally oscillating finger of a comb-drive micro-resonator based on micro-polar fluid theory |
scientific article; zbMATH DE number 6649715 |
Statements
Viscous fluid damping in a laterally oscillating finger of a comb-drive micro-resonator based on micro-polar fluid theory (English)
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9 November 2016
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micro-electro-mechanical systems (MEMS)
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micro-resonator
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micro-polar theory
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viscous fluid damping
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Galerkin method
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0.8522289
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0.84311175
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0.83024263
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0.82814825
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0.8279929
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0.8271392
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