A Multiscale Study of the Epitaxial CVD of Si from Chlorosilanes (Q3369330)
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scientific article; zbMATH DE number 5005786
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| English | A Multiscale Study of the Epitaxial CVD of Si from Chlorosilanes |
scientific article; zbMATH DE number 5005786 |
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A Multiscale Study of the Epitaxial CVD of Si from Chlorosilanes (English)
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13 February 2006
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chemical vapor deposition
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quantum chemistry
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kinetic Monte Carlo
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0.6879228949546814
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0.6734843254089355
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0.6619078516960144
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0.6599798798561096
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0.6564592123031616
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