Implementation of sub-Rayleigh-resolution lithography using an<b><i>N</i></b>-photon absorber (Q3429397)
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scientific article; zbMATH DE number 5139379
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| English | Implementation of sub-Rayleigh-resolution lithography using an<b><i>N</i></b>-photon absorber |
scientific article; zbMATH DE number 5139379 |
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Implementation of sub-Rayleigh-resolution lithography using an<b><i>N</i></b>-photon absorber (English)
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30 March 2007
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Rayleigh limit
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quantum lithography
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multi-photon absorbing material
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0.677283763885498
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0.662136971950531
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0.6530393958091736
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0.6464647054672241
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