Numerical investigation of linear and nonlinear photothermal radiometry on silicon wafers using a Chebyshev spectral method (Q3527147)
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scientific article; zbMATH DE number 5347383
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| default for all languages | No label defined |
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| English | Numerical investigation of linear and nonlinear photothermal radiometry on silicon wafers using a Chebyshev spectral method |
scientific article; zbMATH DE number 5347383 |
Statements
25 September 2008
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Galerkin spectral method
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shifted Chebyshev polynomials
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photothermal techniques
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semiconductor
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0.6626520156860352
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0.6522729992866516
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