Atomistic analysis of B clustering and mobility degradation in highly B-doped junctions (Q3585572)
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scientific article; zbMATH DE number 5773671
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| English | Atomistic analysis of B clustering and mobility degradation in highly B-doped junctions |
scientific article; zbMATH DE number 5773671 |
Statements
Atomistic analysis of B clustering and mobility degradation in highly B‐doped junctions (English)
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20 August 2010
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electronic devices
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process simulation
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dopants
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defects
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diffusion
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electrical activation
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sheet resistance
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mobility
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0.7381752729415894
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0.7339338660240173
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0.6730812191963196
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0.6672751903533936
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