The Isolation Oxidation of Silicon (Q3818028)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | The Isolation Oxidation of Silicon |
scientific article |
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The Isolation Oxidation of Silicon (English)
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1989
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isolation oxidation
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silicon
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integrated circuits
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moving boundaries
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a Newtonian fluid
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reaction controlled oxidation
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