The Isolation Oxidation of Silicon

DOI10.1137/0149016zbMath0665.76108OpenAlexW2044536555MaRDI QIDQ3818028

John R. King

Publication date: 1989

Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1137/0149016

zbMATH Keywords

integrated circuitssiliconmoving boundariesa Newtonian fluidisolation oxidationreaction controlled oxidation

Mathematics Subject Classification ID

Diffusion (76R50) Stokes and related (Oseen, etc.) flows (76D07) Asymptotic expansions of solutions to PDEs (35C20)

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