The design of model predictive control for an AFM and its impact on piezo nonlinearities (Q397592)
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scientific article; zbMATH DE number 6328950
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| English | The design of model predictive control for an AFM and its impact on piezo nonlinearities |
scientific article; zbMATH DE number 6328950 |
Statements
The design of model predictive control for an AFM and its impact on piezo nonlinearities (English)
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12 August 2014
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nanotechnology
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atomic force microscope (AFM)
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creep
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hysteresis
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cross-coupling
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resonant mode
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0.912977933883667
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0.8176185488700867
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0.8046547770500183
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0.7893415093421936
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0.7826205492019653
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