The design of model predictive control for an AFM and its impact on piezo nonlinearities (Q397592)

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The design of model predictive control for an AFM and its impact on piezo nonlinearities
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    The design of model predictive control for an AFM and its impact on piezo nonlinearities (English)
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    12 August 2014
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    nanotechnology
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    atomic force microscope (AFM)
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    creep
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    hysteresis
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    cross-coupling
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    resonant mode
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