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scientific article; zbMATH DE number 67179
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| English | No label defined |
scientific article; zbMATH DE number 67179 |
Statements
27 September 1992
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diffusion equation
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vapor chemical deposition of gaseous silicon
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dopant into a silicon wafer
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free boundary probleme
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finite element
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integrated circuits
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semiconductor device simulation
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0.7446193099021912
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