scientific article; zbMATH DE number 67179

MaRDI QIDQ4011875zbMATH OpenFDO

Authors R. Model, R. Hünlich

Publication date 27 September 1992

zbMATH Keywords

diffusion equationdopant into a silicon waferfinite elementfree boundary problemeintegrated circuitssemiconductor device simulationvapor chemical deposition of gaseous silicon

Mathematics Subject Classification ID

PDEs in connection with optics and electromagnetic theory (35Q60) Free boundary problems for PDEs (35R35) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Applications to the sciences (65Z05) Technical applications of optics and electromagnetic theory (78A55)

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