Fast movement strategies for a step‐and‐scan wafer stepper (Q4354869)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Fast movement strategies for a step‐and‐scan wafer stepper |
scientific article; zbMATH DE number 1062251
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
||
| English | Fast movement strategies for a step‐and‐scan wafer stepper |
scientific article; zbMATH DE number 1062251 |
Statements
Fast movement strategies for a step‐and‐scan wafer stepper (English)
0 references
25 November 1997
0 references
determination of fast movement strategies
0 references
integrated circuits
0 references
generalized asymmetric traveling salesman
0 references
simulated annealing
0 references
0.7047744393348694
0 references
0.7044761180877686
0 references
0.6997904181480408
0 references
0.6966683268547058
0 references
0.6937898993492126
0 references
