Fast movement strategies for a step‐and‐scan wafer stepper

DOI10.1111/1467-9574.00037zbMATH Open0887.90141OpenAlexW2152545384MaRDI QIDQ4354869FDOQ4354869

Authors: C. M. H. Kuijpers, J. B. M. Melissen, Cor Hurkens 

Publication date: 25 November 1997

Published in: Statistica Neerlandica (Search for Journal in Brave)

Full work available at URL: https://research.utwente.nl/en/publications/fast-movement-strategies-for-a-stepandscan-wafer-stepper(1dfaaa5c-5955-4233-943d-0573008f5a12).html

Recommendations

• Scheduling of multiple in-line steppers for semiconductor wafer fabs
• Optimum Scan-Width Selection Under Containment Constraints
• Optimal wafer cutting in shuttle layout problems
• Routing heuristics for automated pick and place machines
• Optimization of the movements of a component placement machine

zbMATH Keywords

simulated annealingintegrated circuitsdetermination of fast movement strategiesgeneralized asymmetric traveling salesman

Mathematics Subject Classification ID

Programming involving graphs or networks (90C35) Applications of mathematical programming (90C90) Case-oriented studies in operations research (90B90) Combinatorial optimization (90C27)

Cited In (1)

• Optimum Scan-Width Selection Under Containment Constraints

This page was built for publication: Fast movement strategies for a step‐and‐scan wafer stepper

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q4354869)