Fast movement strategies for a step‐and‐scan wafer stepper

DOI10.1111/1467-9574.00037MaRDI QIDQ4354869zbMATH OpenOpenAlexFDO

Authors C. M. H. Kuijpers, J. B. M. Melissen, Cor Hurkens

Publication date 25 November 1997

Published in Statistica Neerlandica (Search for Journal in Brave)

Full work available at URL https://research.utwente.nl/en/publications/fast-movement-strategies-for-a-stepandscan-wafer-stepper(1dfaaa5c-5955-4233-943d-0573008f5a12).html

zbMATH Keywords

simulated annealingintegrated circuitsdetermination of fast movement strategiesgeneralized asymmetric traveling salesman

Mathematics Subject Classification ID

Programming involving graphs or networks (90C35) Applications of mathematical programming (90C90) Case-oriented studies in operations research (90B90) Combinatorial optimization (90C27)

Recommendations

• Scheduling of multiple in-line steppers for semiconductor wafer fabs
• Optimum Scan-Width Selection Under Containment Constraints
• Optimal wafer cutting in shuttle layout problems
• Routing heuristics for automated pick and place machines
• Optimization of the movements of a component placement machine

Cited in

(1)

• Optimum Scan-Width Selection Under Containment Constraints

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