Sensitivities of TE-polarized electromagnetic fields to shape changes in diffraction gratings (Q443353)
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scientific article; zbMATH DE number 6063750
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| English | Sensitivities of TE-polarized electromagnetic fields to shape changes in diffraction gratings |
scientific article; zbMATH DE number 6063750 |
Statements
Sensitivities of TE-polarized electromagnetic fields to shape changes in diffraction gratings (English)
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7 August 2012
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inverse problem
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diffraction
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gratings
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electromagnetic scattering
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shape analysis
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metrology
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scatterometry
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0.7482013702392578
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0.7381301522254944
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0.7366409301757812
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0.7292099595069885
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