Sensitivities of TE-polarized electromagnetic fields to shape changes in diffraction gratings (Q443353)

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Sensitivities of TE-polarized electromagnetic fields to shape changes in diffraction gratings
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    Sensitivities of TE-polarized electromagnetic fields to shape changes in diffraction gratings (English)
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    7 August 2012
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    inverse problem
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    diffraction
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    gratings
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    electromagnetic scattering
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    shape analysis
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    metrology
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    scatterometry
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