Shape derivatives for the scattering by biperiodic gratings (Q465076)
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scientific article; zbMATH DE number 6362743
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| English | Shape derivatives for the scattering by biperiodic gratings |
scientific article; zbMATH DE number 6362743 |
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Shape derivatives for the scattering by biperiodic gratings (English)
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31 October 2014
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The author considers diffraction of light by bi-periodic grating configuration and solves numerically the inverse problem of recovering selected parameters of the grating from the computed properties of the diffracted electromagnetic field. By constructing suitable shape-derivative formulae, the initial exact values of the grating parameters are closely approached numerically after a few iterations.
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biperiodic grating
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numerical optimization schemes
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time-harmonic Maxwell's equations
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scatterometry
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inverse problem
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Gauss-Newton numerical method
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0.8256456255912781
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0.8238648772239685
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0.7982468605041504
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0.7937350869178772
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0.7933468818664551
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