A BEM technique for free-molecule flows in high frequency MEMS resonators (Q443447)

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scientific article; zbMATH DE number 6063802
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    A BEM technique for free-molecule flows in high frequency MEMS resonators
    scientific article; zbMATH DE number 6063802

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      A BEM technique for free-molecule flows in high frequency MEMS resonators (English)
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      7 August 2012
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      MEMS
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      free-molecule flow
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      dissipation
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