Modelling, control and simulation of an IC wafer fabrication system: A generalized stochastic coloured timed Petri Net approach (Q4525587)
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scientific article; zbMATH DE number 1555512
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modelling, control and simulation of an IC wafer fabrication system: A generalized stochastic coloured timed Petri Net approach |
scientific article; zbMATH DE number 1555512 |
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Modelling, control and simulation of an IC wafer fabrication system: A generalized stochastic coloured timed Petri Net approach (English)
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2000
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