Modelling, control and simulation of an IC wafer fabrication system: A generalized stochastic coloured timed Petri Net approach (Q4525587)
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scientific article; zbMATH DE number 1555512
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| English | Modelling, control and simulation of an IC wafer fabrication system: A generalized stochastic coloured timed Petri Net approach |
scientific article; zbMATH DE number 1555512 |
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Modelling, control and simulation of an IC wafer fabrication system: A generalized stochastic coloured timed Petri Net approach (English)
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2000
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0.7976722717285156
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0.7915018796920776
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0.7519063353538513
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0.7438035607337952
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