Modelling, control and simulation of an IC wafer fabrication system: A generalized stochastic coloured timed Petri Net approach
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Publication:4525587
DOI10.1080/002075400418270zbMATH Open1094.90536OpenAlexW2144009548MaRDI QIDQ4525587FDOQ4525587
Authors: Ming-Hung Lin, Li-Chen Fu 
Publication date: 2000
Published in: International Journal of Production Research (Search for Journal in Brave)
Full work available at URL: http://ntur.lib.ntu.edu.tw/bitstream/246246/141050/1/16.pdf
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- How to construct an automated warehouse based on colored timed Petri nets
- Modelling and analysis of wafer fabrication scheduling via generalized stochastic Petri net and simulated annealing
- Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets
- Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing
- Modelling and rescheduling of a re-entrant wafer fabrication line involving machine unreliability
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