Modelling, control and simulation of an IC wafer fabrication system: A generalized stochastic coloured timed Petri Net approach

DOI10.1080/002075400418270MaRDI QIDQ4525587zbMATH OpenOpenAlexFDO

Authors Ming-Hung Lin, Li-Chen Fu

Publication date 2000

Published in International Journal of Production Research (Search for Journal in Brave)

Full work available at URL http://ntur.lib.ntu.edu.tw/bitstream/246246/141050/1/16.pdf

Mathematics Subject Classification ID

Production models (90B30)

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(5)

• Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing
• Modelling and rescheduling of a re-entrant wafer fabrication line involving machine unreliability
• How to construct an automated warehouse based on colored timed Petri nets
• Modelling and analysis of wafer fabrication scheduling via generalized stochastic Petri net and simulated annealing
• Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets

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