Shape-based optimal estimation and design of curve evolution processes with application to plasma etching (Q4540262)
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scientific article; zbMATH DE number 1769489
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| English | Shape-based optimal estimation and design of curve evolution processes with application to plasma etching |
scientific article; zbMATH DE number 1769489 |
Statements
Shape-based optimal estimation and design of curve evolution processes with application to plasma etching (English)
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21 July 2002
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nonlinear partial differential equation
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curve evolution process
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plasma etching of thin films
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semiconductor manufacturing
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level set methods
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gradient computation
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0.89580786
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0.8359919
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0.8235143
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0.82060385
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0.81176895
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0.8105496
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0.8089516
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