Shape-based optimal estimation and design of curve evolution processes with application to plasma etching (Q4540262)

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scientific article; zbMATH DE number 1769489
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Shape-based optimal estimation and design of curve evolution processes with application to plasma etching
scientific article; zbMATH DE number 1769489

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    Shape-based optimal estimation and design of curve evolution processes with application to plasma etching (English)
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    21 July 2002
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    nonlinear partial differential equation
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    curve evolution process
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    plasma etching of thin films
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    semiconductor manufacturing
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    level set methods
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    gradient computation
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