A FREE BOUNDARY PROBLEM ASSOCIATED WITH OXIDATION OF SILICON (Q4864024)
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scientific article; zbMATH DE number 839177
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
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| English | A FREE BOUNDARY PROBLEM ASSOCIATED WITH OXIDATION OF SILICON |
scientific article; zbMATH DE number 839177 |
Statements
A FREE BOUNDARY PROBLEM ASSOCIATED WITH OXIDATION OF SILICON (English)
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29 January 1996
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oxidation of silicon
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diffusion of an oxidant
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growth of the oxide layer
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existence
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uniqueness
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0.9070923924446106
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0.8928092122077942
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0.8415696024894714
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0.8302984237670898
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