A FREE BOUNDARY PROBLEM ASSOCIATED WITH OXIDATION OF SILICON

DOI10.1524/ANLY.1995.15.4.393MaRDI QIDQ4864024zbMATH OpenOpenAlexFDO

Authors W. Merz, Jianhua Zhang

Publication date 29 January 1996

Published in Analysis (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1524/anly.1995.15.4.393

zbMATH Keywords

diffusion of an oxidantexistencegrowth of the oxide layeroxidation of siliconuniqueness

Mathematics Subject Classification ID

PDEs in connection with optics and electromagnetic theory (35Q60) Free boundary problems for PDEs (35R35)

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