scientific article; zbMATH DE number 806621

zbMATH Open0833.35002MaRDI QIDQ4850472FDOQ4850472

Authors: Ivan G. Götz, W. Merz, K. Pulverer, Jianhua Zhang 

Publication date: 18 March 1996

Title of this publication is not available (Why is that?)

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zbMATH Keywords

oxidation process of silicon

Mathematics Subject Classification ID

Navier-Stokes equations (35Q30) Free boundary problems for PDEs (35R35)

Cited In (3)

• Title not available (Why is that?)
• A free boundary value problem for the one dimensional oxidation process of silicon
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