scientific article; zbMATH DE number 108274

MaRDI QIDQ4023732zbMATH OpenFDO

Authors W. Merz

Publication date 23 January 1993

zbMATH Keywords

existenceuniquenesstriangular elementsnumerical treatmentthermal oxidation of silicon

Mathematics Subject Classification ID

Reaction-diffusion equations (35K57) Numerical methods for partial differential equations, initial value and time-dependent initial-boundary value problems (65M99) Numerical methods for partial differential equations, boundary value problems (65N99)

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• The oxidation process of silicon: Modelling and mathematical treatment
• Recent advances in models for thermal oxidation of silicon
• A modified Deal-Grove thermal oxidation model for silicon wafers
• Construction of an Asymptotic Model for the Oxidation Process of Silicon
• Oxidation-induced stresses in the isolation oxidation of silicon

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