The oxidation process of silicon: Modelling and mathematical treatment
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Publication:4320632
DOI10.1002/mma.1670171502zbMath0821.35139OpenAlexW2047607528MaRDI QIDQ4320632
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Publication date: 2 February 1995
Published in: Mathematical Methods in the Applied Sciences (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1002/mma.1670171502
phase field modellocal existence resultmathematical model describing the oxidation process of silicon
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