A modified Deal-Grove thermal oxidation model for silicon wafers

MaRDI QIDQ5437757zbMATH OpenFDO

Authors Agneta M. Balint, Robert Szabo, László Nánai, St. Iovan, Stefan Balint

Publication date 28 January 2008

zbMATH Keywords

crystallographic orientationgrowth mechanismDeal-Grove differential equationsilicon oxidthermal oxidation model

Mathematics Subject Classification ID

Chemically reacting flows (80A32)

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