A modified Deal-Grove thermal oxidation model for silicon wafers (Q5437757)
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scientific article; zbMATH DE number 5230323
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| English | A modified Deal-Grove thermal oxidation model for silicon wafers |
scientific article; zbMATH DE number 5230323 |
Statements
28 January 2008
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Deal-Grove differential equation
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growth mechanism
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thermal oxidation model
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silicon oxid
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crystallographic orientation
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0.7802352905273438
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0.7680556774139404
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0.7644362449645996
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0.7458864450454712
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