Performance Evaluation of Numerical Finite Element Coupled Algorithms for Structure–Electric Interaction Analysis of MEMS Piezoelectric Actuator (Q5225919)
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scientific article; zbMATH DE number 7086725
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English | Performance Evaluation of Numerical Finite Element Coupled Algorithms for Structure–Electric Interaction Analysis of MEMS Piezoelectric Actuator |
scientific article; zbMATH DE number 7086725 |
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Performance Evaluation of Numerical Finite Element Coupled Algorithms for Structure–Electric Interaction Analysis of MEMS Piezoelectric Actuator (English)
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29 July 2019
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micro-electro-mechanical system (MEMS)
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structure-electric interaction
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coupled algorithm
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monolithic coupling
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partitioned iterative method
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piezoelectric effect
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bimorph actuator
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