Feedforward control of piezoactuators in atomic force microscope systems (Q5375685)

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scientific article; zbMATH DE number 6937228
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    Feedforward control of piezoactuators in atomic force microscope systems
    scientific article; zbMATH DE number 6937228

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      Feedforward control of piezoactuators in atomic force microscope systems (English)
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      14 September 2018
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