Feedforward control of piezoactuators in atomic force microscope systems

DOI10.1109/MCS.2008.930922MaRDI QIDQ5375685zbMATH OpenOpenAlexFDO

Authors Kam K. Leang, Qingze Zou, Santosh Devasia

Publication date 14 September 2018

Published in IEEE Control Systems (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1109/mcs.2008.930922

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05) Feedback control (93B52)

Cited in

(17)

• Adaptive PI-based sliding mode control for nanopositioning of piezoelectric actuators
• Finite-time terminal sliding mode tracking control for piezoelectric actuators
• Dynamic inversion-based hysteresis compensation using extended high-gain observer
• Iterative tuning of feedforward controller with precise time-delay compensation for precision motion system
• Accounting for hysteresis in repetitive control design: nanopositioning example
• Characterization, modeling and H_ control of n-DOF piezoelectric actuators: application to a 3-DOF precise positioner
• Asymptotic tracking control of uncertain nonlinear systems with unknown actuator nonlinearity and unknown gain signs
• A fast non-singular terminal sliding mode control based on perturbation estimation for piezoelectric actuators systems
• Adaptive trajectory control of microcantilever's tip utilised in atomic force microscopy-based manipulation
• An incremental Hammerstein-like modeling approach for the decoupled creep, vibration and hysteresis dynamics of piezoelectric actuator
• Advanced control of piezoelectric micro-/nano-positioning systems
• Correcting devices of control systems for deformation of multilayered piezodrives of nano- and micrometric movements
• Mechanical and control characteristics of multilayered piezodrives of nano- and micrometric movements for parallel and coded control
• <scp>SVD</scp>‐Based Accurate Identification and Compensation of the Coupling Hysteresis and Creep Dynamics in Piezoelectric Actuators
• Fixed-time adaptive fuzzy control scheme with prescribed tracking accuracy for uncertain nonlinear hysteretic systems
• Why are some hysteresis loops shaped like a butterfly?
• Piezoelectric positioning control with output-based discrete-time terminal sliding mode control

This page was built for publication: Feedforward control of piezoactuators in atomic force microscope systems

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q5375685)