A lattice kinetic Monte Carlo study of void morphological evolution during silicon crystal growth (Q5426645)

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scientific article; zbMATH DE number 5210923
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A lattice kinetic Monte Carlo study of void morphological evolution during silicon crystal growth
scientific article; zbMATH DE number 5210923

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    A lattice kinetic Monte Carlo study of void morphological evolution during silicon crystal growth (English)
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    13 November 2007
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    lattice kinetic Monte Carlo
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    silicon
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    vacancy aggregation
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    oxygen
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    oxygen-vacancy complexes
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