On the functioning of a VHF microelectromechanical resonator (Q5502018)
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scientific article; zbMATH DE number 6472828
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| English | On the functioning of a VHF microelectromechanical resonator |
scientific article; zbMATH DE number 6472828 |
Statements
14 August 2015
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VHF MEMS
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microresonator
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frequency generator
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electrostatic attraction
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auto-oscillation
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phase portrait
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rigidity of a spring
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0.8402489423751831
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0.8066526055335999
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0.7111852765083313
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0.6983103156089783
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0.6937569379806519
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