A general modelling and control framework for electrostatically actuated mechanical systems (Q5704774)

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scientific article; zbMATH DE number 2229365
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A general modelling and control framework for electrostatically actuated mechanical systems
scientific article; zbMATH DE number 2229365

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    A general modelling and control framework for electrostatically actuated mechanical systems (English)
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    15 November 2005
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    micromechanical systems
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    geometric control
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    electrostatic actuator
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    stabilization
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    ANSYS simulation
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