Investigation of the enhancement of microelectromechanical capacitive pressure sensor performance using the genetic algorithm optimization technique (Q6094282)
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scientific article; zbMATH DE number 7747631
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| English | Investigation of the enhancement of microelectromechanical capacitive pressure sensor performance using the genetic algorithm optimization technique |
scientific article; zbMATH DE number 7747631 |
Statements
Investigation of the enhancement of microelectromechanical capacitive pressure sensor performance using the genetic algorithm optimization technique (English)
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10 October 2023
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MEMS
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genetic algorithm
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capacitive pressure sensors
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electrical nonlinearity
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finite element
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0.715460479259491
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0.693047821521759
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0.6836996078491211
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0.6768782734870911
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0.6754567623138428
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