On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate (Q2234591)
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scientific article; zbMATH DE number 7411197
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| English | On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate |
scientific article; zbMATH DE number 7411197 |
Statements
On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate (English)
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19 October 2021
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frequency-response equation
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added mass effect
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beam stiffness
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dynamic bifurcation
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0.7100203633308411
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0.7024217844009399
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0.696284294128418
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0.693047821521759
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