Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory (Q259333)
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scientific article; zbMATH DE number 6554275
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| English | Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory |
scientific article; zbMATH DE number 6554275 |
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Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory (English)
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11 March 2016
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stepped cantilever beam
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pull-in voltage
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modified couple stress theory
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radio frequency (RF) micro electro-mechanical system (MEMS) switch
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analytical solution
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sensitivity analysis
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0.7961556315422058
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0.7464576959609985
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0.7428386211395264
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0.7378528118133545
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0.7338066101074219
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