Nonlinear analysis of piezoelectric multilayered micro-diaphragm based on modified strain gradient theory (Q6157710)

The authors study the influence of size effect and nonlinear piezoelectric effect (electrostriction) on the static deformational behavior of a clamped or simply supported piezoelectric, multilayered circular micro-diaphragm under high electric field. The body contains a piezoelectric layer, a sublayer, top and bottom metal electrode layers under axial symmetry. The analysis is carried out following a modified strain gradient theory. The Rayleigh-Ritz method is then used to obtain numerical results for a concrete example. These are compared with the existing literature based on couple stress theory for the optimal thickness ratio, bending deflection and other relevant parameters of the multilayered micro-diaphragm. Conclusions are formulated which may be useful in the design of piezoelectric micromachined ultrasonic transducers.