Nonlinear transient analysis for large-scale dynamics of microelectromechanical systems with the Mor-Pim method (Q629596)

Microelectromechanical systems are made of very small mechanical devices driven by electricity. Such a system is a large-scale nonlinear dynamical system. In this paper, the authors provided the simulation process to deal with this large-scale system: first, to decompose the term on right side as the linear part and nonhomogeneous part; second, to transform the nonhomogeneous system into a homogeneous system; third, to reduce the order of the large-scale system by Krylov subspace technique; finally, to use the precise integration method for the order reduction system. The numerical experiment is presented for the polysilicon V-beam electro-thermal actuator. The transient analysis is also given.