Adaptation-enhanced model-based control with charge feedback for piezo-actuated stage (Q6563313)
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scientific article; zbMATH DE number 7872566
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| English | Adaptation-enhanced model-based control with charge feedback for piezo-actuated stage |
scientific article; zbMATH DE number 7872566 |
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Adaptation-enhanced model-based control with charge feedback for piezo-actuated stage (English)
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27 June 2024
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adaptive identification
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charge feedback control
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hysteresis compensation
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hysteresis model
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piezoelectric actuator
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