Modeling and analysis of a capacitive MEMS with a microstructured gap subjected to a mechanical shock (Q6661908)
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scientific article; zbMATH DE number 7966074
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| English | Modeling and analysis of a capacitive MEMS with a microstructured gap subjected to a mechanical shock |
scientific article; zbMATH DE number 7966074 |
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Modeling and analysis of a capacitive MEMS with a microstructured gap subjected to a mechanical shock (English)
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13 January 2025
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