Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology (Q6670697)
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scientific article; zbMATH DE number 7974266
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| English | Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology |
scientific article; zbMATH DE number 7974266 |
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Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology (English)
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24 January 2025
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light scattering
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rigorous model
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electric field
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Maxwell's equation
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0.6829236745834351
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0.6724945902824402
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0.6696486473083496
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0.6621593832969666
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0.656049907207489
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