Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology
DOI10.1016/J.JCP.2024.113519MaRDI QIDQ6670697FDOQ6670697
Authors: Helia Hooshmand, Tobias Pahl, Poul-Erik Hansen, Liwei Fu, Alexander Birk, Mirza Karamehmedović, P. Lehmann, Stephan Reichelt, Richard Leach, Samanta Piano 
Publication date: 24 January 2025
Published in: Journal of Computational Physics (Search for Journal in Brave)
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