Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations (Q709928)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations |
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Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations (English)
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18 October 2010
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plasma etching
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etching profile
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level set method
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sparse field method
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3D simulations
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non-convex Hamiltonians
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