Kinetic plasma simulations for three dielectric etchers (Q710204)
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scientific article; zbMATH DE number 5801788
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| English | Kinetic plasma simulations for three dielectric etchers |
scientific article; zbMATH DE number 5801788 |
Statements
Kinetic plasma simulations for three dielectric etchers (English)
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18 October 2010
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dual-frequency
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capacitively coupled plasma
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etcher
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particle simulation
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Monte Carlo collision
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0.7223541140556335
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0.7120912671089172
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0.6941425204277039
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0.6854543685913086
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