The damping in MEMS inertial sensors both at high and low pressure levels (Q840484)
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scientific article; zbMATH DE number 5603293
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| English | The damping in MEMS inertial sensors both at high and low pressure levels |
scientific article; zbMATH DE number 5603293 |
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The damping in MEMS inertial sensors both at high and low pressure levels (English)
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11 September 2009
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MEMS modeling
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inertial sensor
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air damping
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Navier-Stokes equations
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kinetic theory of gases
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0.8325444
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0.8166305
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0.8089399
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0.80824363
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