A lamp thermoelectricity based integrated bake/chill system for photoresist processing (Q865848)
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scientific article; zbMATH DE number 5128444
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| English | A lamp thermoelectricity based integrated bake/chill system for photoresist processing |
scientific article; zbMATH DE number 5128444 |
Statements
A lamp thermoelectricity based integrated bake/chill system for photoresist processing (English)
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20 February 2007
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microlithography
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photoresist processing
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temperature control
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lamp heating
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thermoelectricity
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0.6947811245918274
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0.6766467094421387
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0.6695569753646851
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0.6392358541488647
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