A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation (Q870902)
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scientific article; zbMATH DE number 5134138
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| English | A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation |
scientific article; zbMATH DE number 5134138 |
Statements
A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation (English)
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15 March 2007
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plasma energy flux
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pulse duty cycle
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pulse bias voltage
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Laplace integral transform
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0.7749781608581543
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0.6648285984992981
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0.6620216369628906
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0.6470317244529724
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0.6412879228591919
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